Heat recovery in chip production: economical and sustainable
At a state-of-the-art chip production site in Schleswig-Holstein, four QUANTUM chillers with heat recovery (Green Heat Recovery) and a QUANTUM A1700-T5K00-10VC ensure the optimum temperature in production and in the clean rooms.
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QUANTUM chillersTheme:
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Five QUANTUM Air chillers, four of them with heat recovery, provide a total cooling capacity of 7900 kilowatts and a total heating capacity of 7800 kilowatts at a German chip production site.
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All systems run on the low-GWP refrigerant R-1234ze (GWP < 1, compared to R-134a with GWP 1430) and, in combination with optional heat recovery, ensure an energy-efficient cooling and heating supply in production and in the clean rooms, recovering waste heat from the cooling process to reduce the need for separate heat generation.
A US semiconductor manufacturer is preparing its chip production in Germany for the future with a targeted expansion of its site in Schleswig-Holstein. For its cooling and heating supply, the internationally active company relies on our innovative cooling and heating solutions, which will confidently meet future challenges. Five QUANTUM Air chillers therefore guarantee the optimum temperature in production and in the chip production clean rooms: four QUANTUM A1700 with heat recovery (Green Heat Recovery) and one QUANTUM A1700-T5K00-10VC. Together, the systems impress with their high performance in both the cooling and heating sectors. In total, the QUANTUM models with and without heat recovery have a cooling capacity of 9,600 kilowatts and a heating capacity of 9,800 kilowatts. Thanks to the DirtStop module, which reliably keeps air-side contamination away from the heat exchangers, and corrosion protection for the condensers, operational reliability and consistent efficiency can be relied upon. The experts from ENGIE Refrigeration themselves scored points with the chip production specialist during the planning phase, particularly thanks to their technical expertise in cooling, heating and heat recovery.
Chip production with a future
However, the US semiconductor manufacturer not only benefits from a high-performance, reliable cooling and heating supply and from ENGIE Refrigeration's technical expertise. The customer also benefits from the heat recovery technology from an economic point of view and in terms of reduced primary energy consumption, as waste heat from the cooling process replaces conventional heat generation. In addition, heat recovery increases the overall efficiency of the chiller if it uses the waste heat from the cooling process. The approach involves the recovery and reuse of energy generated during production processes and is part of the company's energy management approach in chip production. The low-GWP refrigerant R-1234ze (GWP < 1), used in all five systems, reduces the global warming potential of the refrigerant charge compared to conventional alternatives such as R-134a (GWP 1430). A continuation of the successful project is already planned: In the coming years, five more chillers from ENGIE Refrigeration will round off the cooling and heating concept.
Further references
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